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EFFECTS OF GEOMETRY ON DIFFUSION-CONTROLLED CHEMICAL-REACTION RATES IN A PLASMA
被引:22
作者
:
BATTEY, JF
论文数:
0
引用数:
0
h-index:
0
机构:
INT PLASMA CORP,HAYWARD,CA 94544
INT PLASMA CORP,HAYWARD,CA 94544
BATTEY, JF
[
1
]
机构
:
[1]
INT PLASMA CORP,HAYWARD,CA 94544
来源
:
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
|
1977年
/ 124卷
/ 03期
关键词
:
D O I
:
10.1149/1.2133320
中图分类号
:
O646 [电化学、电解、磁化学];
学科分类号
:
081704 ;
摘要
:
引用
收藏
页码:437 / 441
页数:5
相关论文
共 4 条
[1]
REDUCTION OF PHOTORESIST STRIPPING RATES IN AN OXYGEN PLASMA BY BY-PRODUCT INHIBITION AND THERMAL MASS
[J].
BATTEY, JF
论文数:
0
引用数:
0
h-index:
0
机构:
INT PLASMA CORP,HAYWARD,CA 94544
INT PLASMA CORP,HAYWARD,CA 94544
BATTEY, JF
.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1977,
124
(01)
:147
-152
[2]
DESIGN CRITERIA FOR UNIFORM REACTION-RATES IN AN OXYGEN PLASMA
[J].
BATTEY, JF
论文数:
0
引用数:
0
h-index:
0
机构:
INT PLASMA CORP,HAYWARD,CA 94544
INT PLASMA CORP,HAYWARD,CA 94544
BATTEY, JF
.
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1977,
24
(02)
:140
-146
[3]
DISSOCIATION OF OXYGEN IN A RADIOFREQUENCY ELECTRICAL DISCHARGE
[J].
BELL, AT
论文数:
0
引用数:
0
h-index:
0
BELL, AT
;
KWONG, K
论文数:
0
引用数:
0
h-index:
0
KWONG, K
.
AICHE JOURNAL,
1972,
18
(05)
:990
-&
[4]
Carslaw H S, 1959, CONDUCTION HEAT SOLI, P220
←
1
→
共 4 条
[1]
REDUCTION OF PHOTORESIST STRIPPING RATES IN AN OXYGEN PLASMA BY BY-PRODUCT INHIBITION AND THERMAL MASS
[J].
BATTEY, JF
论文数:
0
引用数:
0
h-index:
0
机构:
INT PLASMA CORP,HAYWARD,CA 94544
INT PLASMA CORP,HAYWARD,CA 94544
BATTEY, JF
.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1977,
124
(01)
:147
-152
[2]
DESIGN CRITERIA FOR UNIFORM REACTION-RATES IN AN OXYGEN PLASMA
[J].
BATTEY, JF
论文数:
0
引用数:
0
h-index:
0
机构:
INT PLASMA CORP,HAYWARD,CA 94544
INT PLASMA CORP,HAYWARD,CA 94544
BATTEY, JF
.
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1977,
24
(02)
:140
-146
[3]
DISSOCIATION OF OXYGEN IN A RADIOFREQUENCY ELECTRICAL DISCHARGE
[J].
BELL, AT
论文数:
0
引用数:
0
h-index:
0
BELL, AT
;
KWONG, K
论文数:
0
引用数:
0
h-index:
0
KWONG, K
.
AICHE JOURNAL,
1972,
18
(05)
:990
-&
[4]
Carslaw H S, 1959, CONDUCTION HEAT SOLI, P220
←
1
→