EFFECTS OF GEOMETRY ON DIFFUSION-CONTROLLED CHEMICAL-REACTION RATES IN A PLASMA

被引：22

作者：

BATTEY, JF ^{[1
]}

机构：

[1] INT PLASMA CORP,HAYWARD,CA 94544

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1977年 / 124卷 / 03期

关键词：

D O I：

10.1149/1.2133320

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：437 / 441

页数：5

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[1] REDUCTION OF PHOTORESIST STRIPPING RATES IN AN OXYGEN PLASMA BY BY-PRODUCT INHIBITION AND THERMAL MASS
BATTEY, JF
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (01) : 147 - 152
[2] DESIGN CRITERIA FOR UNIFORM REACTION-RATES IN AN OXYGEN PLASMA
BATTEY, JF
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1977, 24 (02) : 140 - 146
[3] DISSOCIATION OF OXYGEN IN A RADIOFREQUENCY ELECTRICAL DISCHARGE
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[4] Carslaw H S, 1959, CONDUCTION HEAT SOLI, P220