EXPERIMENTAL-EVIDENCE FOR THE RECOIL SPUTTERING MECHANISM AS A SOURCE OF HIGH-ENERGY EXCITED SPUTTERED PARTICLES

被引：6
作者：
AUCIELLO, O
机构：
来源：
PHYSICAL REVIEW B | 1981年 / 24卷 / 07期
关键词：
D O I：
10.1103/PhysRevB.24.4065
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：4065 / 4067
页数：3
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