REACTIVE SCATTERING OF ATOMIC OXYGEN FROM CLEAN ELEMENTAL SEMICONDUCTOR SURFACES

被引:39
作者
MADIX, RJ
SUSU, AA
机构
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D O I
10.1016/0039-6028(70)90189-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:377 / &
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