BASIC MECHANISMS IN LASER ETCHING AND DEPOSITION

被引：86
作者：
HOULE, FA
机构：
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1986年 / 41卷 / 04期
关键词：
D O I：
10.1007/BF00616055
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：315 / 330
页数：16
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