EVALUATION OF MICROLENS PROPERTIES IN THE PRESENCE OF HIGH SPHERICAL-ABERRATION

被引：4

作者：

TESTORF, M ^{[1
]}

SINZINGER, S ^{[1
]}

机构：

[1] FERNUNIV, D-58084 HAGEN, GERMANY

来源：

APPLIED OPTICS | 1995年 / 34卷 / 28期

关键词：

MICROOPTICS; MICROLENSES; QUARTER-WAVE CRITERION; ABERRATIONS; LENS CHARACTERIZATION;

D O I：

10.1364/AO.34.006431

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Microlenses can be generated with various fabrication technologies. Some of these technologies cause large spherical aberrations in the resulting microlenses. We describe an algorithm based on Rayleigh's quarter-wave criterion, which allows the evaluation of lens parameters for those microlenses. Specifically, we investigate numerical aperture, focal length, and space-bandwidth product with respect to applications in optical microsystems. We apply our algorithm to different types of microlenses, three gradient-index lenses, and one surface-relief lens. The experimental results demonstrate that our algorithm provides a helpful characterization method for microlenses with large aberrations.

引用

页码：6431 / 6437

页数：7

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