IMPROVED METHOD TO MEASURE THE THICKNESS OF THIN FILMS WITH A PHOTOELECTRIC ELLIPSOMETER

被引：44
作者：
ROTHEN, A
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1957年 / 28卷 / 04期
关键词：
D O I：
10.1063/1.1715860
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
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页码：283 / 285
页数：3
相关论文
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[1]   OPTICAL PROPERTIES OF SURFACE FILMS .2. [J].
ROTHEN, A ;
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REVIEW OF SCIENTIFIC INSTRUMENTS, 1949, 20 (01) :66-72
[2]   OPTICAL MEASUREMENTS OF SURFACE FILMS .1. [J].
ROTHEN, A ;
HANSON, M .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1948, 19 (12) :839-841
[3]   THE ELLIPSOMETER, AN APPARATUS TO MEASURE THICKNESSES OF THIN SURFACE FILMS [J].
ROTHEN, A .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1945, 16 (02) :26-30
[4]  
ROTHEN A, 1951, ANN NY ACAD SCI, V53, P1057
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