TIME-RESOLVED DYNAMICS OF SUBPICOSECOND LASER ABLATION

被引:108
作者
PREUSS, S
SPATH, M
ZHANG, Y
STUKE, M
机构
[1] Max-Planck-Institut für Biophysikalische Chemie, W-3400 Göttingen
关键词
D O I
10.1063/1.109135
中图分类号
O59 [应用物理学];
学科分类号
摘要
The ablation of lithium niobate (LiNbO3), POLY(tetrafluoroethylene) (PTFE, teflon), poly(methylmethacrylate) (PMMA) and polyimide (PI) by 500 fs UV excimer laser pulses at 248 nm is reported. Time-resolved measurements were carried out with pulse pairs of variable delay in the range from -200 to +200 ps. The ablation rate is very sensitive to the time delay between the two pulses, and -depending on the material and fluence-can increase or decrease for very short time delays. For LiNbO3, efficient shielding is observed within a few picoseconds. For PTFE and PMMA, and the total fluence just above threshold, the ablation rate versus time delay shows an autocorrelation type behavior with a full width at half-maximum below 400 fs, since two-photon absorption dominates the ablation process. For polyimide, excited state absorption is found to decrease the ablation rate for delay times below 30 ps.
引用
收藏
页码:3049 / 3051
页数:3
相关论文
共 36 条
[21]   EXCIMER LASER ABLATION OF POLYIMIDE IN A MANUFACTURING FACILITY [J].
LANKARD, JR ;
WOLBOLD, G .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1992, 54 (04) :355-359
[22]   DIRECT OBSERVATION OF EXCIMER-LASER PHOTOABLATION PRODUCTS FROM POLYMERS BY PICOSECOND-UV-LASER MASS-SPECTROSCOPY [J].
LARCIPRETE, R ;
STUKE, M .
APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1987, 42 (03) :181-184
[23]   ULTRAVIOLET-LASER PHOTOABLATION OF POLYMERS - A REVIEW AND RECENT RESULTS [J].
LAZARE, S ;
GRANIER, V .
LASER CHEMISTRY, 1989, 10 (01) :25-40
[24]   A NON-LINEAR CORRELATION METHOD USING MULTI-PHOTON IONIZATION FOR THE MEASUREMENT OF UV ULTRASHORT PULSES [J].
MORITA, N ;
YAJIMA, T .
APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1982, 28 (01) :25-29
[25]   ENERGIES OF IONS PRODUCED BY LASER IRRADIATION [J].
NAMBA, S ;
KIM, PH ;
MITSUYAMA, A .
JOURNAL OF APPLIED PHYSICS, 1966, 37 (08) :3330-+
[26]   OPTICAL-ABSORPTION EDGE OF LINBO3 [J].
REDFIELD, D ;
BURKE, WJ .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (10) :4566-4571
[27]   SURFACE-STRUCTURE OF CUBIC IONIC-CRYSTALS STUDIED BY OPTICAL 2ND-HARMONIC GENERATION [J].
REIF, J ;
TEPPER, P ;
MATTHIAS, E ;
WESTIN, E ;
ROSEN, A .
APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1988, 46 (02) :131-138
[28]   THEORY FOR THE ETCHING OF ORGANIC MATERIALS BY ULTRAVIOLET-LASER PULSES [J].
SAUERBREY, R ;
PETTIT, GH .
APPLIED PHYSICS LETTERS, 1989, 55 (05) :421-423
[29]  
SHANK CV, 1990, DYE LASERS, P139
[30]   TIME-RESOLVED ABLATION-SITE PHOTOGRAPHY OF XECL-LASER IRRADIATED POLYIMID [J].
SIMON, P .
APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1989, 48 (03) :253-256