ENERGY REFLECTION BY BACKSCATTERING AND SPUTTERING - TOTAL YIELDS AND ANGULAR-DISTRIBUTION

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作者：

JAKAS, MM

WILLIAMS, MMR

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JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1980年 / 13卷 / 07期

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D O I：

10.1088/0022-3727/13/7/012

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O59 [应用物理学];

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页码：1169 / 1180

页数：12

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