DEGRADATION OF TIN-DOPED INDIUM-OXIDE FILM IN HYDROGEN AND ARGON PLASMA

被引：87

作者：

BANERJEE, R

RAY, S

BASU, N

BATABYAL, AK

BARUA, AK

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 03期

关键词：

D O I：

10.1063/1.339699

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：912 / 916

页数：5

共 7 条

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[5] GLOW-DISCHARGE PRODUCED AMORPHOUS SILICON SOLAR-CELLS [J].

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[6] ELECTRICAL AND OPTICAL-PROPERTIES OF UNDOPED AND ANTIMONY-DOPED TIN OXIDE-FILMS [J].

SHANTHI, E ;

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CHOPRA, KL .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (12) :6243-6251

[7]

TSUGE K, 1984, 1ST INT PHOT SCI ENG, P179

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