REGISTRATION MARK DETECTION FOR ELECTRON-BEAM LITHOGRAPHY-EL1 SYSTEM

被引：18
作者：
DAVIS, DE
机构：
来源：
IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1980年 / 24卷 / 05期
关键词：
Compendex;
D O I：
10.1147/rd.245.0545
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
LITHOGRAPHY
引用
收藏
页码：545 / 553
页数：9
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