OXIDATION MECHANISM OF AMORPHOUS-SILICON IN AIR

被引:8
作者
OHSAKI, H
MIURA, K
TATSUMI, Y
机构
[1] AICHI UNIV EDUC,DEPT PHYS,KARIYA,AICHI 448,JAPAN
[2] SHINSHU UNIV,FAC EDUC,DEPT NAT SCI,NISHINAGANO,NAGANO 380,JAPAN
关键词
D O I
10.1016/S0022-3093(87)80184-9
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
29
引用
收藏
页码:395 / 406
页数:12
相关论文
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