TEXTURE AND SOME PROPERTIES OF VAPOR-DEPOSITED DIAMOND FILMS

被引：67

作者：

SATO, Y

KAMO, M

机构：

[1] Natl Inst for Research in Inorganic, Materials, Japan

来源：

SURFACE & COATINGS TECHNOLOGY | 1989年 / 39卷 / 1-3期

关键词：

18;

D O I：

10.1016/0257-8972(89)90053-4

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：183 / 198

页数：16

共 18 条

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[2]

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[3]

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[4]

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[6] SYNTHESIS OF DIAMONDS BY USE OF MICROWAVE PLASMA CHEMICAL-VAPOR DEPOSITION - MORPHOLOGY AND GROWTH OF DIAMOND FILMS [J].

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[8] VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE [J].

MATSUMOTO, S ;

SATO, Y ;

KAMO, M ;

SETAKA, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (04) :L183-L185

[9] THERMAL-CONDUCTIVITY OF DIAMOND FILMS SYNTHESIZED BY MICROWAVE PLASMA CVD [J].

ONO, A ;

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[10]

SATO Y, IN PRESS

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