ION-BEAM APPLICATIONS FOR PRECISION INFRARED OPTICS

被引：11

作者：

MCNEIL, JR ^{[1
]}

HERRMANN, WC ^{[1
]}

机构：

[1] OPT ELECTR CORP,DALLAS,TX 75243

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 03期

关键词：

D O I：

10.1116/1.571293

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：324 / 326

页数：3

共 12 条

[1] SCATTERING CHARACTERISTICS OF OPTICAL-MATERIALS [J].

BENNETT, HE .

OPTICAL ENGINEERING, 1978, 17 (05) :480-488

[2]

BENNETT HE, 1980, 11TH P ANN S OPT MAT

[3] INFLUENCE OF ION SPUTTERING ON THE ELEMENTAL ANALYSIS OF SOLID-SURFACES [J].

COBURN, JW .

THIN SOLID FILMS, 1979, 64 (03) :371-382

[4] EFFICIENT PHOTOVOLTAIC HETEROJUNCTIONS OF INDIUM TIN OXIDES ON SILICON [J].

DUBOW, JB ;

BURK, DE ;

SITES, JR .

APPLIED PHYSICS LETTERS, 1976, 29 (08) :494-496

[5]

HERMANN WA, UNPUB

[6]

HERRMANN WC, 1980, 11TH P ANN S OPT MAT

[7] THIN-FILM ANNEALING BY ION-BOMBARDMENT [J].

HIRSCH, EH ;

VARGA, IK .

THIN SOLID FILMS, 1980, 69 (01) :99-105

[8] MODIFICATION OF EVAPORATED CHROMIUM BY CONCURRENT ION-BOMBARDMENT [J].

HOFFMAN, DW ;

GAERTTNER, MR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01) :425-428

[9] ION POLISHING OF COPPER - SOME OBSERVATIONS [J].

HOFFMAN, RA ;

LANGE, WJ ;

CHOYKE, WJ .

APPLIED OPTICS, 1975, 14 (08) :1803-1807

[10] ION POLISHING OF METAL-SURFACES [J].

HOFFMAN, RA ;

LANGE, WJ .

OPTICAL ENGINEERING, 1977, 16 (04) :338-346

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