共 11 条
[3]
100 KV THERMAL FIELD-EMISSION ELECTRON-BEAM LITHOGRAPHY TOOL FOR HIGH-RESOLUTION X-RAY MASK PATTERNING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1992, 10 (06)
:2764-2770
[7]
ROELOEFS MG, 1992, COMPACT BLUE GREEN L, P127