AIDER (ANGLE-OF-INCIDENCE DERIVATIVE ELLIPSOMETRY AND REFLECTOMETRY) - IMPLEMENTATION AND APPLICATION

被引:12
作者
BERMUDEZ, VM
机构
关键词
D O I
10.1016/0039-6028(80)90154-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
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页码:29 / 40
页数:12
相关论文
共 18 条
[1]  
Aspnes D. E., 1975, Optical properties of solidsnew developments, P799
[2]   AIDER - ANGLE-OF-INCIDENCE-DERIVATIVE ELLIPSOMETRY AND REFLECTOMETRY [J].
AZZAM, RMA .
OPTICS COMMUNICATIONS, 1976, 16 (01) :153-156
[3]  
Azzam RMA, 1977, ELLIPSOMETRY POLARIZ
[4]   NEW METHOD FOR DETERMINING OPTICAL-CONSTANTS BY ANGULAR MODULATION OF REFLECTANCE [J].
BALZAROTTI, A ;
PICOZZI, P ;
SANTUCCI, S .
SURFACE SCIENCE, 1973, 37 (01) :994-1001
[6]  
BERMUDEZ VM, 1978, OPT COMMUN, V24, P366
[8]   IMPLICATIONS OF 3 PARAMETER SOLUTIONS TO 3-LAYER MODEL [J].
CAHAN, BD .
SURFACE SCIENCE, 1976, 56 (01) :354-372
[9]   NEW METHOD FOR ACCURATE DETERMINATION OF OPTICAL-CONSTANTS [J].
HUNDERI, O .
APPLIED OPTICS, 1972, 11 (07) :1572-&
[10]   ELLIPSOMETRIC STUDY OF LITHIUM HYDROXIDE OVERLAYERS ON LITHIUM [J].
HUNDERI, O .
SURFACE SCIENCE, 1976, 57 (02) :451-459