ACOUSTIC SURFACE WAVES ON SILICON

被引：39

作者：

PRATT, RG

LIM, TC

机构：

[1] Mullard Research Laboratories, Redhill, Surrey

[2] Department of Mathematics, Imperial College of Science and Technology, London

来源：

APPLIED PHYSICS LETTERS | 1969年 / 15卷 / 12期

关键词：

D O I：

10.1063/1.1652878

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Acoustic surface wave phase velocities have been measured on (001), (110), and (111) surfaces of single-crystal silicon using the wedge method. Good agreement between the theoretical and experimental results was obtained. © 1969 The American Institute of Physics.

引用

页码：403 / &

共 6 条

[1] SURFACE ELASTIC WAVES IN SEMICONDUCTORS [J].