CHARACTERISTICS OF THERMAL ANNEALING OF RADIATION DAMAGE IN MOSFETS

被引：65

作者：

DANCHENKO, V

DESAI, UD

BRASHEARS, SS

机构：

[1] National Aeronautics and Space Administration, Goddard Space Flight Center, Greenbelt, MD

[2] Electro-Mechanical Research, Inc., College Park, MD

来源：

JOURNAL OF APPLIED PHYSICS | 1968年 / 39卷 / 05期

关键词：

D O I：

10.1063/1.1656570

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The thermal annealing characteristics of radiation damage in p-channel MOSFETS due to irradiation by 1.5 MeV electrons as a function of time and temperature are presented. Both isothermal and isochronal annealing curves are analyzed and it is found that the activation energy of the annealing processes has a distribution in a range of 1 eV with the peak at about 1 eV. The mechanism of radiation damage and the model of thermal annealing in the MOSFETS are discussed. © 1968 The American Institute of Physics.

引用

页码：2417 / +

页数：1

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