VOLTAMMETRIC STUDIES OF TANTALUM ELECTRODEPOSITION BATHS

被引:57
作者
CHAMELOT, P [1 ]
TAXIL, P [1 ]
LAFAGE, B [1 ]
机构
[1] UNIV TOULOUSE 3,GENIE CHIM & ELECTROCHIM LAB,CNRS,URA 192,118 ROUTE NARBONNE,F-31062 TOULOUSE,FRANCE
关键词
TANTALUM; ELECTRODEPOSITION; MOLTEN FLUORIDES; POTASSIUM HEPTAFLUOROTANTALATE; SQUARE WAVE VOLTAMMETRY;
D O I
10.1016/0013-4686(94)00262-2
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Deposits of tantalum were prepared at 780-degrees-C by reduction of K2TaF7, the solvent being a eutectic LiF-NaF mixture. Cyclic voltammetry and square-wave voltammetry were used to demonstrate the competition exerted on the reduction of the TaF7(2-) ions leading to deposition of tantalum oxide by reduction of the tantalum oxyfluoride ions [TaOF(n)(n-3), probably with n = 5]. The use of square-wave voltammetry enabled the attribution of a peak to each of the reactions and, from the peak current produced by TaF7(2-) its calibration curve to be established. This curve was used in monitoring the level of TaF7(2-) during the deposition process.
引用
收藏
页码:2571 / 2575
页数:5
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