THIN-FILM TECHNOLOGY FOR SOLID ELECTROLYTE FUEL-CELLS BY THE RF SPUTTERING TECHNIQUE

被引：46
|
作者：
NEGISHI, A
NOZAKI, K
OZAWA, T
机构：
来源：
SOLID STATE IONICS | 1981年 / 3-4卷 / AUG期
关键词：
D O I：
10.1016/0167-2738(81)90129-6
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：443 / 446
页数：4
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