LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF POLYCRYSTALLINE SI FROM SICL4

被引：51
作者：
BARANAUSKAS, V
MAMMANA, CIZ
KLINGER, RE
GREENE, JE
机构：
[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
[3] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
来源：
APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 11期
关键词：
D O I：
10.1063/1.91377
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：930 / 932
页数：3
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