LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF POLYCRYSTALLINE SI FROM SICL4

被引:51
作者
BARANAUSKAS, V
MAMMANA, CIZ
KLINGER, RE
GREENE, JE
机构
[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
[3] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
关键词
D O I
10.1063/1.91377
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:930 / 932
页数:3
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