BATCH-FABRICATED SILICON ACCELEROMETER

被引：310
|
作者：
ROYLANCE, LM
ANGELL, JB
机构：
[1] STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305
[2] STANFORD UNIV,DEPT ELECT ENGN,STANFORD,CA 94305
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1979年 / 26卷 / 12期
关键词：
D O I：
10.1109/T-ED.1979.19795
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1911 / 1917
页数：7
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