BATCH-FABRICATED SILICON ACCELEROMETER

被引：313
作者：
ROYLANCE, LM
ANGELL, JB
机构：
[1] STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305
[2] STANFORD UNIV,DEPT ELECT ENGN,STANFORD,CA 94305
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1979年 / 26卷 / 12期
关键词：
D O I：
10.1109/T-ED.1979.19795
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An extremely small batch-fabricatable accelerometer has been developed using silicon IC technology. The device, 3 mm long and weighing 0.02 g, is a simple cantilevered beam and mass structure sealed into a silicon and glass package. The fabrication of the accelerometer is described, and the theory behind its operation developed. Experimental results on sensitivity, frequency response, and linearity are presented and found to agree with theory. The accelerometer is capable of measuring accelerations from 0.001 to 50 g over a 100-Hz bandwidth, while readily implemented geometry changes allow these performance characteristics to be varied over a wide range to meet the needs of differing applications. Copyright © 1979 by The Institute of Electrical and Electronics Engineers, Inc.
引用
收藏
页码：1911 / 1917
页数：7
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