BATCH-FABRICATED SILICON ACCELEROMETER

被引：310

作者：

ROYLANCE, LM

ANGELL, JB

机构：

[1] STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305

[2] STANFORD UNIV,DEPT ELECT ENGN,STANFORD,CA 94305

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1979年 / 26卷 / 12期

关键词：

D O I：

10.1109/T-ED.1979.19795

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1911 / 1917

页数：7

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