PREPARATION AND AGING OF SPUTTERED TUNGSTIC OXIDE-FILMS

被引：32

作者：

AKRAM, H ^{[1
]}

TATSUOKA, H ^{[1
]}

KITAO, M ^{[1
]}

YAMADA, S ^{[1
]}

机构：

[1] SHIZUOKA UNIV,ELECTR RES INST,HAMAMATSU,SHIZUOKA 432,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 05期

关键词：

D O I：

10.1063/1.339547

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：2039 / 2043

页数：5

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