FOURIER-TRANSFORM INFRARED SPECTROSCOPIC STUDIES ON THE FORMATION OF ULTRATHIN POLYIMIDE FILMS USING LANGMUIR-BLODGETT TECHNIQUES

被引:3
|
作者
ANCELIN, H [1 ]
YARWOOD, J [1 ]
CLINT, JH [1 ]
WILLATT, AJ [1 ]
机构
[1] BP RES CTR,SUNBURY RES CTR,SUNBURY TW16 7LN,MIDDX,ENGLAND
关键词
INFRARED SPECTROMETRY; FOURIER TRANSFORM; POLYIMIDE FILMS; SILICON ELECTRONIC DEVICES; LANGMUIR-BLODGETT FILMS;
D O I
10.1016/0924-2031(90)80009-S
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Fourier transform infrared attenuated total reflectance spectroscopy was used to characterize ultrathin organic polyimide films deposited on silicon using the Langmuir-Blodgett technique. Both the chemistry and the kinetics of conversion from polyamic acid salt to polyimide were elucidated with strong indications of a novel ring structure intermediate. It is concluded that the conversion may be achieved under relatively mild conditions (immersion in methanol, followed by heating to ca. 85-degrees-C), which is likely to be of importance in an industrial context.
引用
收藏
页码:81 / 86
页数:6
相关论文
共 50 条