ELLIPSOMETRY WITH IMPERFECT COMPONENTS INCLUDING INCOHERENT EFFECTS

被引：37

作者：

AZZAM, RMA

BASHARA, NM

机构：

来源：

关键词：

D O I：

10.1364/JOSA.61.001380

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1380 / &

共 6 条

AZZAM, RMA ;

BASHARA, NM .

[2] CALIBRATION OF ELLIPSOMETER DIVIDED CIRCLES [J].

AZZAM, RMA ;

BASHARA, NM .

[3] EFFECTS OF POLARIZER ELLIPTICITY ON ELLIPSOMETRY MEASUREMENTS [J].

HUNTER, WR ;

EATON, DH ;

SAH, CT .

[4] ANALYSES AND CORRECTIONS OF INSTRUMENTAL ERRORS IN ELLIPSOMETRY [J].

MCCRACKIN, FL .

[5]

SHURCLIFF WA, 1962, POLARIZED LIGHT, P165

[6]

VANDEHULST HC, 1957, LIGHT SCATTERING SMA, P44