DEVELOPMENT OF HIGHLY RELIABLE SYNCHROTRON RADIATION LITHOGRAPHY BEAMLINE

被引：9

作者：

OKADA, K ^{[1
]}

FUJII, K ^{[1
]}

KAWASE, Y ^{[1
]}

NAGANO, M ^{[1
]}

机构：

[1] NEC CORP,DIV RES & DEV PLANNING & TECH SERV,MIYAMAE KU,KAWASAKI,KANAGAWA 213,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.584043

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：191 / 194

页数：4

共 10 条

[1] MEASUREMENTS ON THE EFFICIENCY OF ACOUSTIC DELAY-LINES IN VIEW OF BEAM LINES FOR SYNCHROTRON RADIATION [J].

BETZ, H ;

HOFBAUER, P ;

HEUBERGER, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (03) :924-926

[2] SYNCHROTRON RADIATION X-RAY-LITHOGRAPHY [J].

HAELBICH, RP ;

SILVERMAN, JP ;

WARLAUMONT, JM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1984, 222 (1-2) :291-301

[3]

Heuberger A., 1986, Microelectronic Engineering, V5, P3, DOI 10.1016/0167-9317(86)90026-2

[4]

Jean R., 1964, VIDE, V111, P123

[5] PNEUMATICALLY-DRIVEN FAST CLOSING VALVE SYSTEM FOR SYNCHROTRON RADIATION SOURCES [J].

KANAYA, N ;

SATO, S ;

NAKAJIMA, K ;

HAYASHI, S .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1986, 33 (03) :1071-1077

[6] THE MIRROR MATERIAL TEST PROGRAM AT THE DARESBURY SRS [J].

MACDOWELL, AA ;

WEST, JB ;

KOIDE, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 246 (1-3) :219-222

[7] SIC MIRRORS FOR SYNCHROTRON RADIATION [J].

REHN, V ;

CHOYKE, WJ .

NUCLEAR INSTRUMENTS & METHODS, 1980, 177 (01) :173-178

[8] TRANSIT TIMES OF PRESSURE WAVES IN AN ACOUSTIC DELAY-LINE [J].

SATO, S ;

KAKIZAKI, A ;

MIYA, T ;

MORIOKA, Y ;

YAMAKAWA, T ;

ISHII, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1985, 240 (01) :194-198

[9] FRONT ENDS FOR THE PHOTON FACTORY BEAM LINES [J].

SATO, S ;

KOIDE, T ;

MORIOKA, Y ;

ISHII, T ;

SUGAWARA, H ;

NAGAKURA, I .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 208 (1-3) :31-36

[10] REFLECTANCE SPECTRA OF EXTREME ULTRAVIOLET MIRRORS FOR SYNCHROTRON RADIATION [J].

SUGAWARA, H ;

SATO, S ;

MIYAHARA, T ;

KAKIZAKI, A ;

MORIOKA, Y ;

IGUCHI, Y ;

NAGAKURA, I ;

ANDO, M ;

OHTA, T ;

AOKI, S .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1985, 228 (2-3) :549-555

← 1 →