A VERY LOW-COST PRESSURE SENSOR WITH EXTREMELY HIGH-SENSITIVITY

被引：8

作者：

CSASZAR, C ^{[1
]}

HARSANYI, G ^{[1
]}

AGARWAL, RP ^{[1
]}

机构：

[1] UNIV ROORKEE,DEPT ELECTR & COMP ENGN,ROORKEE 247667,UTTAR PRADESH,INDIA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 42卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(94)80024-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new type of piezoresistive pressure sensor has been fabricated by polymer thick-film technology. The resistor bridge is screen-printed and cured onto a flexible substrate, which has been successfully used in hybrid technology for several years. Because of the high flexibility of the substrate, high sensitivity can be achieved at low cost. During the realization, several technological problems arising from the material characteristics of the substrate have to be overcome. The most difficult one is the appropriate handling of the flexible substrate during screen-printing, curing and soldering without generating built-in stresses. This is the reason why a new technology has in fact been developed. As a result, an extremely sensitive pressure sensor has been realized at a low cost.

引用

页码：417 / 420

页数：4