X-RAY STUDIES OF TI-N COATINGS

被引：4

作者：

ZHANG, N ^{[1
]}

ZHAI, W ^{[1
]}

WANG, Y ^{[1
]}

WAGENDRISTEL, A ^{[1
]}

机构：

[1] VIENNA TECH UNIV,INST APPL & TECH PHYS,A-1040 VIENNA,AUSTRIA

来源：

VACUUM | 1993年 / 44卷 / 01期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1016/0042-207X(93)90012-Y

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Detailed studies of Ti-N coatings deposited either by hollow cathode evaporation or by ion sputtering onto high speed steel have been performed. Phase identification, texture and profile analysis were carried out from X-ray diffraction data. A series of stable and unstable phases were found. The (111) texture was dominant in all cases. Dislocation density and configuration were determined by X-ray profile analysis to give an estimate of coating hardness.

引用

页码：51 / 53

页数：3

共 7 条

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[6]

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[7]

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