FMR STUDY OF AN ION-IMPLANTED LAYER ON BUBBLE GARNET-FILMS

Properties of magnetic anisotropy of an ion-implanted layer on [111]-oriented bubble garnet films have been studied in relation to implantation dosages by ferromagnetic resonance techniques. As has been reported, subpeaks generated in the implanted layer were observed in addition to the main peak related to the garnet film itself. The resonant field of these subpeaks showed a strong dependence on the orientation in the (11̄0) plane, whereas dependence was weak in the (111) plane. Data was analyzed under the assumption that signals from the implanted region of specimens are of uniform mode, and it was found that implanted layers of a Y1.33Eu0.2Yb 0.57Ca0.9Ge0.9Fe4.1O 1@qL 2 film implanted with neon at an energy of 100 keV with dosages ranging from 1.1×1014 to 2.0×1014/cm 3 were magnetically uniaxial, the easy axis being the (111) plane and the hard axis, the [111] axis. A precisely defined method for determining implantation-induced anisotropy was developed, and results showed that its magnitude is several 104 erg/cm3. Proton-implanted specimens were also investigated.