POLYMERIZATION OF ORGANOSILICONES IN MICROWAVE DISCHARGES

被引:99
作者
WROBEL, AM [1 ]
WERTHEIMER, MR [1 ]
DIB, J [1 ]
SCHREIBER, HP [1 ]
机构
[1] ECOLE POLYTECH,DEPT CHEM ENGN,MONTREAL H3C 3A7,QUEBEC,CANADA
来源
JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY | 1980年 / A14卷 / 03期
关键词
D O I
10.1080/00222338008056716
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
引用
收藏
页码:321 / 337
页数:17
相关论文
共 18 条
[1]   GENERATION OF LARGE VOLUME MICROWAVE PLASMAS [J].
BOSISIO, RG ;
WERTHEIMER, MR ;
WEISSFLOCH, CF .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1973, 6 (07) :628-630
[2]   STUDIES ON SOLUBLE FRACTION OF GLOW-DISCHARGE POLYSILAZANE FORMED FROM HEXAMETHYLCYCLOTRISILAZANE [J].
GAZICKI, M ;
WROBEL, AM ;
KRYSZEWSKI, M .
JOURNAL OF APPLIED POLYMER SCIENCE, 1977, 21 (08) :2013-2019
[3]  
HUDIS M, 1975, MAY IEEE INT C PLASM
[4]  
HUDIS M, 1974, TECHNIQUES APPLICATI
[5]   DENSITY DETERMINATION OF RF PLASMA POLYMERS [J].
KNICKMEYER, WW ;
PEACE, BW ;
MAYHAN, KG .
JOURNAL OF APPLIED POLYMER SCIENCE, 1974, 18 (01) :301-303
[6]   ELECTRICAL-PROPERTIES OF METAL-POLYMER (POLYSILOXANE)-SILICON STRUCTURES AND APPLICATION OF POLYSILOXANE TO PASSIVATION OF SEMICONDUCTOR-DEVICES [J].
MAISONNEUVE, M ;
SEGUI, Y ;
BUI, A .
THIN SOLID FILMS, 1976, 33 (01) :35-41
[7]  
RAO CNR, 1963, CHEM APPLICATIONS IN
[8]   GLOW-DISCHARGE POLYMERIZATION OF ORGANIC SILICONES (E-10) [J].
SANDVED, JS ;
KRISTIANSEN, K .
VACUUM, 1977, 27 (04) :235-239
[9]   APPLICATION OF MICROWAVE PLASMAS FOR PASSIVATION OF METALS [J].
SCHREIBER, HP ;
TEWARI, YB ;
WERTHEIMER, MR .
INDUSTRIAL & ENGINEERING CHEMISTRY PRODUCT RESEARCH AND DEVELOPMENT, 1978, 17 (01) :27-30
[10]   THIN ORGANOSILICON FILMS FOR INTEGRATED OPTICS [J].
TIEN, PK ;
SMOLINSKY, G ;
MARTIN, RJ .
APPLIED OPTICS, 1972, 11 (03) :637-+