CONSTRUCTION OF A HIGH-RESOLUTION ELECTRON-ENERGY-LOSS SPECTROMETER

被引:14
|
作者
NAGAO, T [1 ]
IIZUKA, Y [1 ]
UMEUCHI, M [1 ]
SHIMAZAKI, T [1 ]
NAKAJIMA, M [1 ]
OSHIMA, C [1 ]
机构
[1] IBM JAPAN LTD, YAMATO LAB, YAMATO 242, JAPAN
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 02期
关键词
D O I
10.1063/1.1145115
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A new version of a high-resolution electron energy loss spectrometer has been constructed. Major modifications are the enlargement of the analyzer, gold coating of all the electrode surfaces facing the electron beam, and the reduction of magnetic fields. A high detector current of 4 pA has been obtained together with the narrow energy half width of 1.2 meV (FWHM) in the straight-through mode.
引用
收藏
页码:515 / 516
页数:2
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