SOME FACTORS INFLUENCING THE FORMATION OF REACTION-BONDED SILICON-NITRIDE

被引：85
|
作者：
PIGEON, RG
VARMA, A
MILLER, AE
机构：
[1] UNIV NOTRE DAME,DEPT CHEM ENGN,NOTRE DAME,IN 46556
[2] UNIV NOTRE DAME,DEPT ELECT ENGN,NOTRE DAME,IN 46556
来源：
JOURNAL OF MATERIALS SCIENCE | 1993年 / 28卷 / 07期
关键词：
D O I：
10.1007/BF00595765
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Several salient factors influencing the formation of reaction-bonded silicon nitride (RBSN) compacts have been studied. These include the effects of mullite and alumina furnace tubes typically employed during ''high-purity'' nitridation studies, pre-sintering of green silicon compacts, free powder versus compact nitridation, and the influence of metal/metal oxide additions. The latter studies have provided experimental evidence for enhancement due to dissociated nitrogen, and suggest that (1 ) beta-Si3N4 formation does not necessarily require a liquid phase, (2) atomic nitrogen stimulates beta-phase formation, and (3) the liquid phase provides an efficient source for volatile silicon, promoting alpha-Si3N4. These conclusions are consistent with accepted mechanisms for the formation of the two phases.
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页码：1919 / 1936
页数：18
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