OPTICAL COATINGS DEPOSITED USING ION ASSISTED DEPOSITION

被引：19
作者：
MCNALLY, JJ [1 ]
JUNGLING, KC [1 ]
WILLIAMS, FL [1 ]
MCNEIL, JR [1 ]
机构：
[1] UNIV NEW MEXICO,DEPT ELECT & COMP ENGN,ALBUQUERQUE,NM 87131
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574940
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2145 / 2149
页数：5
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