OPTICAL COATINGS DEPOSITED USING ION ASSISTED DEPOSITION

被引：19

作者：

MCNALLY, JJ ^{[1
]}

JUNGLING, KC ^{[1
]}

WILLIAMS, FL ^{[1
]}

MCNEIL, JR ^{[1
]}

机构：

[1] UNIV NEW MEXICO,DEPT ELECT & COMP ENGN,ALBUQUERQUE,NM 87131

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574940

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2145 / 2149

页数：5

共 14 条

[1] CONTAMINATION ANALYSIS OF TIO2 THIN-FILMS DEPOSITED USING ION ASSISTED DEPOSITION
ALJUMAILY, GA
WILSON, SR
BARRON, AC
MCNEIL, JR
DOYLE, BL
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 906 - 909
[2] EFFECT OF ION ASSISTED DEPOSITION ON OPTICAL SCATTER AND SURFACE MICROSTRUCTURE OF THIN-FILMS
ALJUMAILY, GA
MCNALLY, JJ
MCNEIL, JR
HERRMANN, WC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03): : 651 - 655
[3] ALLEN TH, 1982, P SOC PHOTO-OPT INST, V325, P93, DOI 10.1117/12.933291
[4] MODIFICATION OF NIOBIUM FILM STRESS BY LOW-ENERGY ION-BOMBARDMENT DURING DEPOSITION
CUOMO, JJ
HARPER, JME
GUARNIERI, CR
YEE, DS
ATTANASIO, LJ
ANGILELLO, J
WU, CT
HAMMOND, RH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 349 - 354
[5] HERRMANN WC, 1982, P SOC PHOTO-OPT INST, V325, P101, DOI 10.1117/12.933292
[6] SIMPLE METHOD FOR DETERMINATION OF OPTICAL-CONSTANTS N,K AND THICKNESS OF A WEAKLY ABSORBING THIN-FILM
MANIFACIER, JC
GASIOT, J
FILLARD, JP
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1976, 9 (11): : 1002 - 1004
[7] ION-BEAM-ASSISTED DEPOSITION OF THIN-FILMS
MARTIN, PJ
MACLEOD, HA
NETTERFIELD, RP
PACEY, CG
SAINTY, WG
[J]. APPLIED OPTICS, 1983, 22 (01): : 178 - 184
[8] MODIFICATION OF THE OPTICAL AND STRUCTURAL-PROPERTIES OF DIELECTRIC ZRO2 FILMS BY ION-ASSISTED DEPOSITION
MARTIN, PJ
NETTERFIELD, RP
SAINTY, WG
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (01) : 235 - 241
[9] ION-ASSISTED DEPOSITION OF TA2O5 AND AL2O3 THIN-FILMS
MCNALLY, JJ
ALJUMAILY, GA
MCNEIL, JR
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 437 - 439
[10] MCNALLY JJ, 1985, P SOC PHOTO-OPT INST, V540, P479, DOI 10.1117/12.976155

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