FABRICATION OF BI(PB)-SR-CA-CU-O SUPERCONDUCTING THIN-FILMS BY RAPID THERMAL ANNEALING

被引：0
作者：
YU, CF
LEE, JYM
LIN, IN
YANG, SJ
HSU, SE
机构：
[1] CHUNG SHAN INST SCI & TECHNOL,CTR MAT RES & DEV,LUNGTAN,TAIWAN
[2] TSING HUA UNIV,CTR MAT SCI,HSINCHU,TAIWAN
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1992年 / 21卷 / 10期
关键词：
HIGH TC SUPERCONDUCTOR; BI-SR-CA-CU-O; THIN FILMS; RAPID THERMAL ANNEALING;
D O I：
10.1007/BF02684202
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Superconducting Bi(Pb)-Sr-Ca-Cu-O thin films were successfully fabricated on MgO substrates by dc sputtering and rapid thermal annealing. No furnace annealing was used in the process. The superconducting thin films, deposited by dc sputtering for 8 hr and rapid thermally annealed at 845-degrees-C for 60 sec, showed a superconducting transition onset temperature of 110 K and a zero resistance transition temperature of 86 K. Highly oriented films with the c-axis normal to the substrate surface were obtained. To our knowledge, this is the first time that Bi(Pb)-Sr-Ca-Cu-O superconducting thin films have been fabricated using rapid thermal annealing.
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页码：955 / 958
页数：4
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