HIGH-PRESSURE STEAM STABILIZATION OF TANTALUM THIN-FILM RESISTORS

被引：0
作者：
PITETTI, RC
KELLER, HN
MORABITO, JM
机构：
来源：
THIN SOLID FILMS | 1982年 / 87卷 / 01期
关键词：
D O I：
10.1016/0040-6090(82)90563-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：1 / 11
页数：11
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