ION-IMPLANTATION FOR INSITU QUANTITATIVE ION MICROPROBE ANALYSIS

被引：99

作者：

LETA, DP ^{[1
]}

MORRISON, GH ^{[1
]}

机构：

[1] CORNELL UNIV,DEPT CHEM,ITHACA,NY 14853

来源：

ANALYTICAL CHEMISTRY | 1980年 / 52卷 / 02期

关键词：

D O I：

10.1021/ac50052a015

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：277 / 280

页数：4

共 12 条

[1] THERMODYNAMIC APPROACH TO QUANTITATIVE INTERPRETATION OF SPUTTERED ION MASS-SPECTRA [J].

ANDERSEN, CA ;

HINTHORNE, JR .

ANALYTICAL CHEMISTRY, 1973, 45 (08) :1421-1438

[2] QUANTITATIVE ION PROBE MEASUREMENT USING MATRIX ION SPECIES RATIOS [J].

GANJEI, JD ;

LETA, DP ;

MORRISON, GH .

ANALYTICAL CHEMISTRY, 1978, 50 (02) :285-290

[3] QUANTITATIVE ION-IMPLANTATION - THEORETICAL ASPECTS [J].

GRIES, WH .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1979, 30 (02) :97-112

[4] QUANTITATIVE ION-IMPLANTATION - PRACTICE [J].

GRIES, WH .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1979, 30 (02) :113-125

[5] FORMATION OF CONES DURING SPUTTERING [J].

GVOSDOVER, RS ;

EFREMENKOVA, VM ;

SHELYAKIN, LB ;

YURASOVA, VE .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1976, 27 (3-4) :237-244

[6]

LETA DP, ANAL CHEM

[7]

LINDHARD J, 1963, MAT FYS MEDD DAN VID, P33

[8]

MAYER JW, 1970, ION IMPLANTATION SEM, P19

[9]

MCHUGH JA, 1976, METHODS SURFACE ANAL

[10] EVALUATION OF SEVERAL SEMI-THEORETICAL METHODS FOR QUANTITATIVE SECONDARY ION MASS-SPECTROMETRIC ANALYSIS AFTER DISCRIMINATION-CORRECTION OF DATA [J].

RUDAT, MA ;

MORRISON, GH .

ANALYTICAL CHEMISTRY, 1979, 51 (08) :1179-1187

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