Precision Dimensional Inspection of Diameters of Circular Reflecting Cylinders

被引：0

作者：

Lemeshko, Yu. A. ^{[1
]}

Chugui, Yu. V. ^{[1
]}

Yarovaya, A. K. ^{[1
]}

机构：

[1] Russian Acad Sci, Technol Design Inst Sci Instrument Engn, Siberian Branch, Novosibirsk, Russia

来源：

OPTOELECTRONICS INSTRUMENTATION AND DATA PROCESSING | 2007年 / 43卷 / 03期

关键词：

D O I：

10.3103/S8756699007030120

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A method for measuring diameters of circular reflecting cylinders is discussed. The method consists in processing a diffraction pattern that is formed in the near-field zone by illuminating the object edges by a plane monochromatic beam. An equivalent mathematical model of forming a diffraction field is developed and experimentally validated. The model makes it possible to obtain analytical functions describing the distribution of the field from the circular reflecting cylinder. The influence of the cylinder reflecting surface on the diffraction pattern parameters is studied. A highly accurate algorithm is proposed for calculating the diameter of the cylindrical article by its Fresnel diffraction pattern with an error under 1 mu m.

引用

页码：284 / 291

页数：8

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