A STUDY OF HYDROGEN DIFFUSION IN CRYSTALLINE SILICON BY SECONDARY-ION MASS-SPECTROMETRY

被引：14

作者：

TONG, BY ^{[1
]}

WU, XW ^{[1
]}

YANG, GR ^{[1
]}

WONG, SK ^{[1
]}

机构：

[1] UNIV WESTERN ONTARIO,DEPT CHEM,LONDON N6A 3K7,ONTARIO,CANADA

来源：

CANADIAN JOURNAL OF PHYSICS | 1989年 / 67卷 / 04期

关键词：

D O I：

10.1139/p89-067

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：379 / 383

页数：5

共 50 条

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