A STUDY OF HYDROGEN DIFFUSION IN CRYSTALLINE SILICON BY SECONDARY-ION MASS-SPECTROMETRY

被引：14
|
作者：
TONG, BY [1 ]
WU, XW [1 ]
YANG, GR [1 ]
WONG, SK [1 ]
机构：
[1] UNIV WESTERN ONTARIO,DEPT CHEM,LONDON N6A 3K7,ONTARIO,CANADA
来源：
CANADIAN JOURNAL OF PHYSICS | 1989年 / 67卷 / 04期
关键词：
D O I：
10.1139/p89-067
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：379 / 383
页数：5
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