A STUDY OF HYDROGEN DIFFUSION IN CRYSTALLINE SILICON BY SECONDARY-ION MASS-SPECTROMETRY

被引：14

|

作者：

TONG, BY ^{[1
]}

WU, XW ^{[1
]}

YANG, GR ^{[1
]}

WONG, SK ^{[1
]}

机构：

[1] UNIV WESTERN ONTARIO,DEPT CHEM,LONDON N6A 3K7,ONTARIO,CANADA

来源：

CANADIAN JOURNAL OF PHYSICS | 1989年 / 67卷 / 04期

关键词：

D O I：

10.1139/p89-067

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：379 / 383

页数：5

相关论文

共 50 条

[1] A SECONDARY-ION MASS-SPECTROMETRY STUDY OF P(+) POROUS SILICON
KARANOVICH, AA
ROMANOV, SI
KIRIENKO, VV
MYASNIKOV, AM
OBODNIKOV, VI
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1995, 28 (11) : 2345 - 2348
[2] SECONDARY-ION MASS-SPECTROMETRY
ZALM, PC
VACUUM, 1994, 45 (6-7) : 753 - 772
[3] SECONDARY-ION MASS-SPECTROMETRY
GRASSERBAUER, M
CHEMIE IN UNSERER ZEIT, 1994, 28 (05) : 222 - 232
[4] DETERMINATION OF HYDROGEN IN SILICATES BY SECONDARY-ION MASS-SPECTROMETRY
OTTOLINI, L
BOTTAZZI, P
ZANETTI, A
VANNUCCI, R
ANALYST, 1995, 120 (05) : 1309 - 1313
[5] DIFFUSION OF TIN IN GERMANIUM STUDIED BY SECONDARY-ION MASS-SPECTROMETRY
FRIESEL, M
SODERVALL, U
GUST, W
JOURNAL OF APPLIED PHYSICS, 1995, 78 (09) : 5351 - 5355
[6] SECONDARY-ION MASS-SPECTROMETRY AND GEOLOGY
MACRAE, ND
CANADIAN MINERALOGIST, 1995, 33 : 219 - 236
[7] SECONDARY-ION MASS-SPECTROMETRY - FOREWORD
BENTZ, BL
ODOM, RW
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1995, 143 : R9 - R9
[8] SECONDARY-ION MASS-SPECTROMETRY IMAGING
ODOM, RW
APPLIED SPECTROSCOPY REVIEWS, 1994, 29 (01) : 67 - 116
[9] DETECTION OF DEPOSITION AND DIFFUSION OF CLEAVAGE PRODUCTS BY SECONDARY-ION MASS-SPECTROMETRY
BESKE, HE
HOLZBRECHER, H
MIKROCHIMICA ACTA, 1978, 1 (1-2) : 201 - 208
[10] SECONDARY-ION MASS-SPECTROMETRY OF PARTICLE BEAMS
SANDERS, PE
RAPID COMMUNICATIONS IN MASS SPECTROMETRY, 1990, 4 (04) : 123 - 124

← 1 2 3 4 5 →