EFFECT OF PIEZOELECTRIC TRANSDUCER NONLINEARITY ON PHASE-SHIFT INTERFEROMETRY

被引:129
作者
AI, C
WYANT, JC
机构
来源
APPLIED OPTICS | 1987年 / 26卷 / 06期
关键词
D O I
10.1364/AO.26.001112
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
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页码:1112 / 1116
页数:5
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