REACTION OF ATOMIC FLUORINE WITH SILICON - THE GAS-PHASE PRODUCTS

被引：137

作者：

VASILE, MJ

STEVIE, FA

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 05期

关键词：

D O I：

10.1063/1.331122

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3799 / 3805

页数：7

共 19 条

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