REACTION OF ATOMIC FLUORINE WITH SILICON - THE GAS-PHASE PRODUCTS

被引：137
|
作者：
VASILE, MJ
STEVIE, FA
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 05期
关键词：
D O I：
10.1063/1.331122
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：3799 / 3805
页数：7
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