BEHAVIOR OF SORB-AC WAFER PUMPS IN PLASMA MACHINES

被引：13
作者：
ROSAI, L
FERRARIO, B
DELLAPORTA, P
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 02期
关键词：
D O I：
10.1116/1.569503
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：746 / 750
页数：5
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