LOW-DAMAGE PROCESSING OF CDTE(110) SURFACES USING ATOMIC-HYDROGEN

被引：19

作者：

LUO, Y ^{[1
]}

SLATER, DA ^{[1
]}

OSGOOD, RM ^{[1
]}

机构：

[1] COLUMBIA UNIV,COLUMBIA RADIAT LAB,NEW YORK,NY 10027

来源：

APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 01期

关键词：

D O I：

10.1063/1.115491

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present the results of an AES, XPS, and LEED study of the reaction of oxide and contaminant overlayers on the CdTe(110) surface with atomic hydrogen. Exposure of an oxidized surface to a flux of atomic hydrogen produced by "cracking" ambient molecular hydrogen on a hot tungsten filament results in a rapid, quantitative removal of the oxide overlayer with substrate temperatures as low as 300 K to produce a stoichiometric surface free of contaminants which has sufficient surface order to produce a sharp (1×1) LEED pattern.© 1995 American Institute of Physics.

引用

收藏

页码：55 / 57

页数：3

相关论文

共 21 条

[1] X-RAY PHOTOEMISSION STUDIES OF TELLURIUM AND SOME OF ITS COMPOUNDS [J].

BAHL, MK ;

WATSON, RL ;

IRGOLIC, KJ .

JOURNAL OF CHEMICAL PHYSICS, 1977, 66 (12) :5526-5535

[2] LOW-TEMPERATURE SURFACE CLEANING OF INP BY IRRADIATION OF ATOMIC-HYDROGEN [J].

CHUN, YJ ;

SUGAYA, T ;

OKADA, Y ;

KAWABE, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1993, 32 (2B) :L287-L289

[3] INSITU RHEED MONITORING OF HYDROGEN PLASMA CLEANING ON SEMICONDUCTOR SURFACES [J].

KISHIMOTO, A ;

SUEMUNE, I ;

HAMAOKA, K ;

KOUI, T ;

HONDA, Y ;

YAMANISHI, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (10) :2273-2276

[4]

KOLODZIEJSKI LS, COMMUNICATION

[5]

KONDO N, 1990, JPN J APPL PHYS, V28, pL7

[6] GASB-OXIDE REMOVAL AND SURFACE PASSIVATION USING AN ELECTRON-CYCLOTRON RESONANCE HYDROGEN SOURCE [J].

LU, Z ;

JIANG, Y ;

WANG, WI ;

TEICH, MC ;

OSGOOD, RM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (04) :1856-1861

[7] GAAS-OXIDE REMOVAL USING AN ELECTRON-CYCLOTRON RESONANCE HYDROGEN PLASMA [J].

LU, Z ;

SCHMIDT, MT ;

CHEN, D ;

OSGOOD, RM ;

HOLBER, WM ;

PODLESNIK, DV ;

FORSTER, J .

APPLIED PHYSICS LETTERS, 1991, 58 (11) :1143-1145

[8] DYNAMICAL CALCULATION OF LOW-ENERGY ELECTRON-DIFFRACTION INTENSITIES FROM GAAS(110) - INFLUENCE OF BOUNDARY-CONDITIONS, EXCHANGE POTENTIAL, LATTICE-VIBRATIONS, AND MULTILAYER RECONSTRUCTIONS [J].

MEYER, RJ ;

DUKE, CB ;

PATON, A ;

KAHN, A ;

SO, E ;

YEH, JL ;

MARK, P .

PHYSICAL REVIEW B, 1979, 19 (10) :5194-5205

[9]

MUILENBURG GE, 1978, HDB XRAY PHOTOELECTR

[10] ENERGETICS OF GAAS(100)-(2X4) AND GAAS(100)-(4X2) RECONSTRUCTIONS [J].

NORTHRUP, JE ;

FROYEN, S .

PHYSICAL REVIEW LETTERS, 1993, 71 (14) :2276-2279