PREFERENTIAL DEPOSITION OF SILVER INDUCED BY LOW-ENERGY GOLD ION IMPLANTATION

被引:4
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STROUD, PT
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10.1016/0040-6090(72)90256-8
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T [工业技术];
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08 ;
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页码:273 / &
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共 15 条
[1]   INITIAL GROWTH OF THIN FILMS - FRACTIONAL NUCLEATION RATE CONCEPT [J].
CHAPMAN, BN ;
JORDAN, MR .
JOURNAL OF PHYSICS PART C SOLID STATE PHYSICS, 1969, 2 (09) :1550-&
[2]   Theory of the adsorption and related occurrences [J].
Frenkel, J .
ZEITSCHRIFT FUR PHYSIK, 1924, 26 :117-138
[3]  
KASPAUL AF, 1963, 10 AVS T NATL VAC S, P422
[4]   NUCLEATION AND INITIAL-GROWTH BEHAVIOR OF THIN-FILM DEPOSITS [J].
LEWIS, B ;
CAMPBELL, DS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1967, 4 (05) :209-&
[5]  
Lindhard J., 1963, MAT FYS MEDD K DAN V, V33, P31
[6]  
Mayer J. W., 1970, ION IMPLANTATION SEM
[7]  
NELSON RS, 1970, PRIVATE COMMUNICATIO
[8]   RESISTIVE LAYERS FORMED BY ION IMPLANTATION INTO METAL FILMS [J].
PERKINS, JG ;
COLLINS, LE .
THIN SOLID FILMS, 1970, 5 (5-6) :R59-&
[9]  
PERKINS JG, 1970, AWRE0970 REP
[10]  
PERKINS JG, 1970, COMP REND COUPES INT, P323