STRESSES GENERATED BY THE THERMOMIGRATION OF LIQUID INCLUSIONS IN SILICON

被引：16
作者：
ANTHONY, TR
CLINE, HE
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1978年 / 49卷 / 12期
关键词：
D O I：
10.1063/1.324581
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：5774 / 5782
页数：9
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