GAAS FILMS GROWN BY VACUUM CHEMICAL EPITAXY USING THERMALLY PRECRACKED TRIMETHYL-ARSENIC

被引:16
作者
FRAAS, LM [1 ]
MCLEOD, PS [1 ]
WEISS, RE [1 ]
PARTAIN, LD [1 ]
CAPE, JA [1 ]
机构
[1] CHEVRON RES CO,RICHMOND,CA 94802
关键词
D O I
10.1063/1.339145
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:299 / 301
页数:3
相关论文
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MCLEOD, PS ;
PARTAIN, LD ;
CAPE, JA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01) :22-29
[3]  
SITTING M, 1981, HDB TOXIC HAZARDOUS, P61
[5]  
1986, ORGANOMETALLICS LIT, P69
[6]  
1946, PB158508