BUILDUP OF ION-IMPLANTATION DAMAGE IN HG1-XCDXTE FOR VARIOUS X-VALUES

被引：21

作者：

UZANSAGUY, C ^{[1
]}

COMEDI, D ^{[1
]}

RICHTER, V ^{[1
]}

KALISH, R ^{[1
]}

TRIBOULET, R ^{[1
]}

机构：

[1] CNRS,PHYS SOLIDES LAB,F-92195 MEUDON,FRANCE

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 04期

关键词：

D O I：

10.1116/1.575799

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2575 / 2579

页数：5

共 25 条

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